1. Bulk Gas System Definition:
Storage and pressure control of inert gases Gas types: Typical inert gases (nitrogen, argon, compressed air, etc.)
Pipeline size: From 1/4 (monitoring pipeline) to 12-inch main pipeline
The main products of the system are: diaphragm valve/bellows valve/ball valve, high-purity connector (VCR, welding form), ferrule connector, pressure regulating valve, pressure gauge, etc.
Currently, the new system also includes a bulk special gas system, which uses fixed gas cylinders or tank trucks for storage and transportation.
2. Purification System Definition:
Removal of impurities from bulk gases for high-purity gas pipelines
3. Gas Cabinets Definition:
Provide pressure control and flow monitoring for special gas sources (toxic, flammable, reactive, corrosive gases), and have the ability to replace gas cylinders.
Location: Located on the Sub-fab floor or the bottom floor for storage of special gases Source: NF3, SF6, WF6, etc.
Pipeline size: Internal gas pipeline, generally 1/4 inch for process pipeline, 1/4-3/8 inch mainly for high purity nitrogen purge pipeline.
Main products: High purity diaphragm valves, check valves, pressure gauges, pressure gauges, high purity connectors (VCR, welding form) These gas cabinets basically contain automatic switching capabilities for cylinders to ensure continuous gas supply and safe replacement of cylinders.
4. Distribution Definition:
Connecting the gas source to the gas collection coil
Line size: In the chip factory, the size of the bulk gas distribution pipeline generally ranges from 1/2 inch to 2 inches.
Connection form: Special gas pipelines are generally connected by welding, without any mechanical connection or other moving parts, mainly because the welding connection has strong sealing reliability.
In a chip factory, there are hundreds of kilometers of tubing connected to transmit gas, which are basically about 20 feet long and welded together. Some tubing bends and tubular welding connections are also very common.
5. Multi-function valve box (Valve Manifold Box, VMB) Definition:
It is to distribute special gases from the gas source to different equipment ends.
Internal pipeline size: 1/4 inch process pipeline, and 1/4 - 3/8 inch purge pipeline. The system may use computer control to require actuated valves or lower cost situations with manual valves.
System products: high purity diaphragm valves/bellows valves, check valves, high purity joints (VCR, micro-welding form), pressure regulating valves, pressure gauges and pressure gauges, etc. For the distribution of some inert gases, the Valve Manifold Panel - VMP (multi-function valve disc) is mainly used, which has an open gas disc surface and does not require a closed space design and additional nitrogen purge.
6. Secondary valve plate/box (Tool Hookup Panel) Definition:
Connect the gas required by the semiconductor equipment from the gas source to the equipment end and provide corresponding pressure regulation. This panel is a gas control system that is closer to the equipment end than the VMB (multi-function valve box).
Gas pipeline size: 1/4 - 3/8 inch
Liquid pipeline size: 1/2 - 1 inch
Discharge pipeline size: 1/2 - 1 inch
Main products: diaphragm valve/bellows valve, one-way valve, pressure regulating valve, pressure gauge, pressure gauge, high-purity joint (VCR, micro-welding), ferrule joint, ball valve, hose, etc.
Post time: Nov-22-2024